Introduction

Like the Sputter deposition chamber, the DLP lithography station is used by HackerFab for their open-source chip fab. I had taken up as the mechanical design lead for this project in addition to my work on Sputter as I had found myself with more free time after graduation. The original design was created by the HackerFab at Carnagie Mellon Universities and was being maintained and modified at the University of Waterloo by students.

This project required knowledge in general structural design and thermodynamics for cooling the LEDs in the projector. In addition to practicing my mechanical engineering skill, I was able to learn and practice soldering, testing hardware, and reading circuit schematics. Much like the sputter deposition chamber, I was able to host “lectures” for new members who are interested in learning CAD fundamentals using OnShape.

Mechanical Modifications

Vertically aligning the DLP lithography station is the main goal of the mechanical modifications. This allows the silicon substrate to be placed on a horizontal platform instead of being suspended vertically, reducing positioning errors.

I designed a frame made out of aluminum extrusion for its stability and ease of assembly, while a mounting bracket was made by a student from a local high school had expressed interest in both HackerFab and learning 3D design with OnShape.

Due to the lithographer itself being suspended, cutting down on the weight of the lithographer is important to improve stability. To do this, I removed the outer aluminum casing, and cooling fans and replaced it with passively cooled heat sinks. Every component that is necessary to cover was replaced by a 3D printed shell as it is easy to design, manufacture, and install.